X, Y, .theta. alignment mechanism
X-Y controller with pivotally mounted transducers
X-Y drive apparatus
X-Y drive apparatus
X-Y Movement mechanism
X-Y movement mechanism
X-Y position controller having axially-inclined transducer membe
X-Y stage apparatus capable of reducing the number of drive...
X-Y table for bonding devices
X-Y-Z drive apparatus
XY linear slide mechanism
XY table actuator