4. Heating
  5. Heating or heat retaining work chamber structure
  6. Including baffle wall, work shield, or work support element
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Apparatus and method for heating substrates

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate

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Apparatus for baking resists on semiconductor wafers

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Patent

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Apparatus for processing a wafer

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate

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