4. Heat exchange
  5. With retainer for removable article
  6. Including liquid heat exchange medium
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Apparatus for controlling thermal transfer in a cyclic vacuum pr

Heat exchange – With retainer for removable article – Including liquid heat exchange medium
Patent

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Apparatus for gas-assisted, solid-to-solid thermal transfer with

Heat exchange – With retainer for removable article – Including liquid heat exchange medium
Patent

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Apparatus for mechanically clamping semiconductor wafer against

Heat exchange – With retainer for removable article – Including liquid heat exchange medium
Patent

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