4. Fluid handling
  5. Line condition change responsive valves
  6. Pilot or servo controlled
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Controlled high pressure relief for small volumes

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent

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Controller gain scheduling for mass flow controllers

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate

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Controlling vacuum level with a two-level vacuum system controll

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent

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Cross line relief valve mechanism

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent

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