4. Electricity: measuring and testing
  5. Measuring, testing, or sensing electricity, per se
  6. Electrostatic attraction or piezoelectric
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Micro-mechanical probes for charge sensing

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Electrostatic attraction or piezoelectric
Reexamination Certificate

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Microdeflector probe for electrostatic voltmeter

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Electrostatic attraction or piezoelectric
Patent

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Movement actuator/sensor systems

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Electrostatic attraction or piezoelectric
Patent

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