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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Patent

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Patent

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Patent

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Patent

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
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Vacuum processing apparatus and operating method with...

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
Reissue Patent

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Vacuum processing apparatus and operating method with...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
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Vacuum processing apparatus and vacuum processing method

Drying and gas or vapor contact with solids – Process – With nondrying treating of material
Reexamination Certificate

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Vacuum processing method and apparatus

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure varies during treatment
Reexamination Certificate

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum treatment of waste stream

Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
Reexamination Certificate

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Vacuum treatment of waste stream with anti-incrustation...

Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
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Vacuum treatment of waste stream with anti-incrustation...

Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
Reexamination Certificate

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Vacuum-degreasing cleaning method

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
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