4. Drying and gas or vapor contact with solids
  5. Process
  6. With sealing of treating chamber
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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
Reexamination Certificate

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Vacuum processing apparatus and operating method with...

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
Reissue Patent

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