4. Drying and gas or vapor contact with solids
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  6. Cooling by gas or vapor contact
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Heat transfer fluids and methods of making and using same...

Drying and gas or vapor contact with solids – Process – Cooling by gas or vapor contact
Reexamination Certificate

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Heater block cooling system for wafer processing apparatus

Drying and gas or vapor contact with solids – Process – Cooling by gas or vapor contact
Reexamination Certificate

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