4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. History logging or time stamping
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Monitoring device and monitoring method for vacuum device

Data processing: measuring – calibrating – or testing – Measurement system – History logging or time stamping
Reexamination Certificate

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Monitoring system behavior using empirical distributions and...

Data processing: measuring – calibrating – or testing – Measurement system – History logging or time stamping
Reexamination Certificate

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