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Remote exposure of workpieces using a recirculated plasma

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Reexamination Certificate

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Remote-plasma-CVD method for coating or for treating large-surfa

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Patent

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