4. Coating apparatus
  5. Control means responsive to a randomly occurring sensed...
  6. Responsive to condition of coating material
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Beam source for deposition of thin film alloys

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent

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Bubble detection system for detecting bubbles in photoresist...

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate

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