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Ultra-low resistivity tantalum films and methods for their...

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Reexamination Certificate

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Underground backfill for magnesium anodes

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Uniform plasma etching system

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Unit for measuring alkali metal vapor concentration

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Use of pulsed-DC wafer bias for filling vias/trenches with metal

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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