4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

James Harry Freeman

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Generator of ribbon-shaped ion beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Generator of ribbon-shaped ion beam

Radiant energy – Ion generation – Field ionization type
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Ion beam separators

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-925026

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