4. Electric heating
  5. Metal heating
  6. By arc

Sung-Weon Lee

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Electrostatic chuck for preventing an arc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Impedance matching circuit for inductively coupled plasma...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2758290

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