4. Electric heating
  5. Metal heating
  6. By arc

Masaki Tozawa

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Method and apparatus for monitoring tool performance

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method for cleaning plasma treatment device and plasma...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method for dynamic sensor configuration and runtime execution

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Plasma film forming method and plasma film forming apparatus

Electric heating – Metal heating – By arc
Reexamination Certificate

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Plasma film forming method and plasma film forming apparatus

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2045979

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