Low-abberation spectrometer objective with high secondary electr

Details Low-abberation spectrometer objective with high secondary electr Low-abberation spectrometer objective with high secondary electr

1987-04-21

1988-03-01

Church, Craig E.

Radiant energy

Electron energy analysis

250310, H01J 37252, H01J 4944

Patent

active

047287900

ABSTRACT:
The spectrometer objective of the invention is composed of a short focal length objective lens (OL) and a spectrometer-detector arrangement which is completely integrated in the magnetic lens. The working distance (L) has a decisive influence on the chromatic and spherical image defect of the objective lens (OL) which can be reduced with the arrangement of the invention and, thus, the diameter of the electron probe on the specimen (PR) can be substantially demagnified. An angle-independent accumulation of the secondary electrons (SE) are triggered such that the measuring location occurs according to the invention by imaging of the virtual source point (QS) of the secondary electrons (SE) into the center of a spherical opposing field which occurs in the spatial region between two spherical-symmetrical grid electrodes (K1 and K2).

REFERENCES:
patent: 4464571 (1984-08-01), Plies
Japanese Publication Proceeding of the Symposium on Electron Beam Testing 9, Nov. 10, 1984, Osaka, Japan pp. 69-72, Entitled Electron Beam Tester Within the Lens Analyzer by Kamamato.

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