Material or article handling – Device for emptying portable receptacle – For emptying contents thereof into portable receiving means
Patent
1990-10-09
1993-01-19
Bucci, David A.
Material or article handling
Device for emptying portable receptacle
For emptying contents thereof into portable receiving means
414156, 414173, 414417, 414DIG4, 414DIG6, 432241, B65G 6900
Patent
active
051802732
ABSTRACT:
An apparatus for transferring a predetermined number of semiconductor wafers to a wafer boat charging/discharging unit or to one of an array of vertical type dispersing furnaces via the wafer boat charging/discharging unit. The apparatus is operated by actuating the wafer boat charging/discharging unit adapted to charge a wafer boat having a mass of semiconductor wafers carried thereon in a vertical state in a furnace tube of the dispersing furnace by using a vertically displaceable wafer boat stage on which the wafer boat is charged in a furnace tube in cooperation with a wafer boat handler. After completion of a dispersing operation, the wafer boat is lowered away from the furnace tube and then returned to a wafer boat transferring passage with the aid of the wafer boat handler. The apparatus includes as essential components a wafer carrier holding section having a plurality of wafer carriers carried thereon, a turn head for displacing one of the wafer carriers via turning movement by an angle of 180 degrees, an attitude changing mechanism for turning a wafer boat having a mass of semiconductor wafers received therein from a horizontal position to a vertical position by an angle of 90 degrees and a wafer boat transferring section extending in front of the array of vertical type dispersing furnaces.
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Kodama Shoichi
Sakaya Kazuhiro
Bucci David A.
Kabushiki Kaisha Toshiba
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