Method of forming an antifuse element with substantially reduced

Details Method of forming an antifuse element with substantially reduced Method of forming an antifuse element with substantially reduced

1990-04-12

1991-10-15

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437919, 437922, 437979, 437985, 148DIG14, 148DIG55, 148DIG116, 148DIG117, 148DIG141, H01L 2176

Patent

active

050574515

ABSTRACT:
A minimum sized aperture for a reduced capacitance anti-fuse or other structure may be formed by birds beak encroachment of thick oxide under a masking layer or by isotropic etching of a masking layer followed by birds beak encroachment of thick oxide.

REFERENCES:
patent: 4394181 (1983-07-01), Nicholas
patent: 4441247 (1984-04-01), Gargini et al.
patent: 4574465 (1986-03-01), Rao
patent: 4823181 (1989-04-01), Mohsen et al.
patent: 4866001 (1989-09-01), Pickett et al.
patent: 4981813 (1991-01-01), Bryant et al.

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