Device for gripping, holdings and/or transporting substrates

Details Device for gripping, holdings and/or transporting substrates Device for gripping, holdings and/or transporting substrates

1997-02-24

2000-04-25

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429815, 20429823, 20429828, 118729, 414223, C23C 1434

Patent

active

06054029&

ABSTRACT:
Apparatus 1 for gripping, holding and/or transporting substrates 2, components of which are an entry station 3 and several processing station 4 to 9 arranged in series or in a circle for receiving the substrate 2, to which the substrate 2 is passed on by means of a transporting device 1 disposed on gripper arms 13 and having gripper elements 24, or a turntable 12, and subsequently is deposited in one or several deposit stations 14, wherein several gripper arms 13 can be shifted in the horizontal and/or vertical direction by means of the turntable 12. Some of the gripper elements 24 can be shifted together in the horizontal or vertical direction by means of the turntable 12 and at least one gripper arm 13' can be shifted in at least one of the movement directions independently of the remaining gripper arms 13.

REFERENCES:
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patent: 5288379 (1994-02-01), Namiki et al.
patent: 5407314 (1995-04-01), Kempf
patent: 5518599 (1996-05-01), Schwartz et al.
patent: 5611861 (1997-03-01), Higashi
patent: 5612068 (1997-03-01), Kempf et al.
patent: 5662785 (1997-09-01), Schertler
patent: 5692873 (1997-12-01), Weeks et al.
patent: 5709785 (1998-01-01), LeBlanc, III et al.
Singulus "A Family of Single Disc Metallizing Systems"--Product Brochure (No Date).
Singulus 11/1.8--"The 1.8 Second Metallizer for Compact Discs"--Product Brochure (No Date).

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