Piezoelectric resonator

Details Piezoelectric resonator Piezoelectric resonator

1994-03-09

1995-06-06

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, H01L 4108

Patent

active

054225337

ABSTRACT:
A piezoelectric resonator for use with microwave monolithic integrated ciit (MMIC) devices which are fabricated on (100) GaAs (gallium arsenide) material is provided. This resonator has a central resonator flat portion composed of (100) GaAs material and has a distributed reflector on each side of the flat portion with each reflector having an alternating series of layers, including a first layer having doped regions and an uppermost layer composed of the (100) GaAs material.

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