Focal plane array

Details Focal plane array Focal plane array

1983-07-15

1986-09-30

James, Andrew J.

357 30, H01L 2978, H01L 2714, H01L 3100

Patent

active

046149600

ABSTRACT:
A focal plane array, comprised of an infrared (IR) photovoltaic detector array coupled to a charge coupled device (CCD), which provides for minimum deviation in input threshold voltage between individual detector input nodes of the array is disclosed. In one embodiment, an oxide nitride dielectric layer overlays the entire CCD with the exception of the areas beneath the direct injection gates where only a thin oxide dielectric is formed. In another embodiment, the oxide beneath the direct injection gates is substantially thinner than the oxide beneath the remainder of the CCD structure.

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Foss et al., "Threshold Variation Effects in IR Detector/CCD Focal Planes", Joint Meeting of the IRIS Specialty Groups on Infrared Detectors and Imaging (U), vol. I, Jun. 13-15, 1978, pp. 115-130, C1-C4.
Kosonocky et al., "Two Phase Charge-Coupled Devices with Overlapping Polysilicon and Aluminum Gates", RCA Review, vol. 34, Mar. 1973, pp. 164-202.

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