Multi-dimensional force detector

Details Multi-dimensional force detector Multi-dimensional force detector

1991-09-20

1995-06-06

Chilcot, Jr., Richard E.

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

73718, 73862042, G01L 300

Patent

active

054212138

ABSTRACT:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

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