Pattern test apparatus

Details Pattern test apparatus Pattern test apparatus

1988-02-10

1990-10-09

Moore, David K.

Image analysis

Histogram processing

For setting a threshold

382 8, 382 34, 382 51, 382 27, G06K 962

Patent

active

049625411

ABSTRACT:
Disclosed is a pattern test apparatus for detecting a fault on the basis of comparison/collation between a test reference pattern and a test target pattern, the apparatus being arranged such that a picture element area is defined by a circle with a predetermined radius on a reference matter having at test reference pattern, and when the number of the picture elements located on the reference pattern is larger than the number of the picture elements located outside the reference pattern, a part of the reference pattern corresponding to a picture element located in the center of the circle is deleted. By such an arrangement, the test reference pattern can be made analogous to the real test target pattern regardless of the shape thereof, so that misjudgment of a normal test target pattern for a fault pattern can be prevented.

REFERENCES:
patent: 3791678 (1988-12-01), Iwase et al.
patent: 4665554 (1987-05-01), Sternberg
patent: 4805224 (1989-02-01), Koezuka et al.

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