Thin film capacitors

Details Thin film capacitors Thin film capacitors

1981-11-18

1983-10-04

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361326, 428472, 501 32, 501 41, 501136, 501137, H01G 420

Patent

active

044082541

ABSTRACT:
A capacitor is formed by placing between two electodes a thin film of amorphous titanate which has been ion implanted with noble gas ions.

REFERENCES:
patent: 3723838 (1973-03-01), Kumagai
patent: 3847658 (1974-11-01), Kumagai
patent: 3976511 (1976-08-01), Johnson
patent: 4119554 (1978-10-01), Fujiwara

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