Semiconductor devices and manufacturing methods

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 29578, 148 15, 357 231, H01L 21265

Patent

active

045233683

ABSTRACT:
A field effect device having a gate over a portion of a surface of a semiconductor disposed between a source region and a drain region and including a buried doped region having a conductivity type opposite the conductivity type of the semiconductor formed in the semiconductor under, and spaced from such portion of the surface of the semiconductor. The buried doped region is electrically connected to the gate electrode. With such arrangement a field effect device is formed with a connecting channel having a shallow depth in the semiconductor between the gate and the buried doped layer. A method for fabricating field effect devices is also disclosed, such method including the step of forming a pair of masking surfaces of insulating material on the surface of the semiconductor. An ion implantation masking layer is formed between the pair of masking surfaces to enable the selective implantation of particles in the semiconductor to establish the source and drain regions. With such method a single level of masking is used to define the source, drain and gate regions of the device.

REFERENCES:
patent: 3739237 (1973-06-01), Shannon
patent: 3790411 (1974-02-01), Simms et al.
patent: 3928082 (1975-12-01), Schwettmann et al.
patent: 4025364 (1977-05-01), Smith
patent: 4173063 (1979-11-01), Kniepkamp et al.
patent: 4232439 (1980-11-01), Shibata

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