Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1978-06-20
1984-07-24
Kaplan, G. L.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
310253, 427 39, 427114, C23C 1500, H01R 3920
Patent
active
044616899
ABSTRACT:
A method and apparatus for coating a member of graphite with a thin layer of an electrically highly conductive material from the vapor phase in which at least part of the material is deposited on the graphite member by ion plating to result in particularly well adhering and relatively thick layers of the materials being deposited on the graphite members.
REFERENCES:
patent: 3433682 (1969-03-01), Kalnin
patent: 3547692 (1970-12-01), Hill
patent: 3860443 (1975-01-01), Lachman et al.
patent: 4016389 (1977-04-01), White
patent: 4132828 (1979-01-01), Nakamura
D. M. Mattox, Fundamentals of Ion Plating, J. Vac. Sci. Technol., vol. 10, No. 1, Jan./Feb. 1973, pp. 47-52.
S. Schiller et al., Alternate Ion Plating-A Method of High-Rate Ion Vapor Deposition, J. Vac. Sci. Technol., vol. 12, No. 4, Jul./Aug. 1975, pp. 858-864.
R. D. Blond et al., Effect of Ion Bombardment during Deposition on Thick Metal and Ceramic Deposits, J. Vac. Sci. Technol., vol. 11, No. 4, Jul./Aug. 1974, pp. 621-674.
R. Carpenter, Ion Plating: How to Make Films Stick, Compon. Technol., vol. 4, No. 6, Feb. 1971, pp.17-22.
Kaplan G. L.
Leader William T.
Siemens Aktiengesellschaft
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