Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1984-03-30
1986-08-05
Pianalto, Bernard D.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192EC, 427128, 427130, 427132, H01F 1002
Patent
active
046041761
ABSTRACT:
A method of fabricating a thin magnetic film having improved magnetoresistive readout characteristics as a binary memory device is disclosed. The film is initially formed from a metal vapor as a series of discrete grains upon a substrate surface that is heated to approximately 300.degree. C. Upon continued growth of the film, the grains merge at their boundaries forming a continuous thin film, the grain boundary heights of which, e.g., 1000 .ANG., are substantially greater than the thickness, e.g., 320 .ANG., of the eventual thin magnetizable film. The thin film is then rotated while being ion milled at an oblique angle to a substantially uniform film thickness of e.g. 320 .ANG..
Grace Kenneth T.
Johnson Charles A.
Pianalto Bernard D.
Sperry Corporation
Truex Marshall M.
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