Pellicle for a mask or substrate

Details Pellicle for a mask or substrate Pellicle for a mask or substrate

1997-01-29

1998-03-17

Braun, Fred L.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

359511, 428 14, G03B 2752, G03B 1104, G02B 700

Patent

active

057293252

ABSTRACT:
A pellicle for a mask or substrate including a frame having one end surface and another end surface and a membrane extended over the frame on the one end surface side. A channel is formed in the other end surface of the frame. The channel is filled with a layer of a tackifier capable of expanding upon heating and/or light irradiation such that the tackifier layer does not protrude outward beyond the other end surface of the frame in an unexpanded state, but protrudes outward beyond the other end surface of the frame when expanded. No liner is attached to the tackifier layer.

REFERENCES:
patent: 5529819 (1996-06-01), Campi
patent: 5616927 (1997-04-01), Kubota et al.
Patent Abstracts of Japan, vol. 18, No. 228, Apr. 25, 1994.

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