Coating processes – Electrical product produced – Metallic compound coating
Patent
1987-06-02
1990-08-07
Bell, Janyce
Coating processes
Electrical product produced
Metallic compound coating
252 629, 427 96, 427162, 427226, 427240, 4273762, B05D 512
Patent
active
049467107
ABSTRACT:
A method to produce thin films suitable for fabricating ferroelectric thin films. The method provides for selection of the predetermined amounts of lead, lanthanum, zirconium, and titanium precursors which are soluble in different solvents. Dissolving predetermined amounts of the precursors in their respective solvents in proportions such that hydrolyze reaction rate for each metal precursor will be approximately equal. The precursors and solvents are mixed, and water is added to begin a hydrolysis reaction. After the hydrolysis the solution is heated to drive off the excess water and solvent to promote the formation of a sol-gel. The sol-gel is then applied to a thin substrate and sintered to produce the ferroelectric film.
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Chapin Leo N.
Evans, Jr. Joseph T.
Miller William D.
Bell Janyce
National Semiconductor Corporation
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