Method of producing metallic thin film sensors

Coating processes – Electrical product produced – Metal coating

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Other Related Categories

4271265, 427240, 427241, 4273762, 4273763, 4274193, 427421, 427425, 4274301, 427229, B05D 512

Type

Patent

Status

active

Patent number

052564436

Description

ABSTRACT:
A thin film made of a sol solution of noble metal alcoxides is formed on a substrate and then dried and baked in a reductive or oxidative atmosphere to produce a thin film of metals or metal oxides. The solution of noble metal alcoxides may contain merely a single component or a plurality of components. In addition, a solution of metal alcoxides with noble metal alcoxides as main components or additives may be used in place of the solution of noble metal alcoxides. The thin film of metals or metal oxides can be formed in a single layer or a plurality of layers on a substrate to improve, for example, the response of a sensor.

REFERENCES:
patent: 4554176 (1985-11-01), Asano et al.
patent: 4874462 (1989-10-01), Makita et al.
J. S. Reed, "Introduction to the Principles of Ceramic Processing," John Wiley & Sons Inc. 1988 pp. 403-405.
D. W. Johnson, Jr., "Sol-gel Processing of Ceramics and Glass," Ceramic Bulletin 64[12](1985) pp. 1597-1602.
S. Sakko et al., Journal of Materials Science Letters 2 (1983) pp. 395-396.

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