Micromachined sensor device using a beam of light with a frequen

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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25022721, 7386259, G01L 110

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active

053389298

ABSTRACT:
In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.

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