Method and apparatus for reducing particle contamination

Details Method and apparatus for reducing particle contamination Method and apparatus for reducing particle contamination

1993-07-26

1999-06-01

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

118715, C23C 1600

Patent

active

059086629

ABSTRACT:
A processing system including a vacuum chamber 24 and at least one tube 12 disposed through a wall 14 of the vacuum chamber 24 is described herein. A gas diffuser 22 is disposed in said tube 12, possibly at the end of the tube 12 and/or outside the chamber 24. The gas diffuser 22 is formed from a porous, possibly metallic, material which includes a plurality of microscopic holes whereby gas entering or leaving the vacuum chamber through the tube has a reduced force compared to if the gas diffuser 22 was not present. Other systems and methods are also disclosed.

REFERENCES:
patent: 5002793 (1991-03-01), Arai
patent: 5123375 (1992-06-01), Hansen

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