Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Making emissive array
Patent
1998-04-10
2000-09-12
Mulpuri, Savitri
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Making emissive array
438 44, 438 46, 438751, H01L 2100
Patent
active
061176990
ABSTRACT:
An array of n-wavelength vertical cavity surface emitting lasers (VCSELs) can be grown with precise and repeatable wavelength control. First, a foundation VCSEL structure is grown on a substrate. Next, n-paired layers of AlGaAs and InGaP are grown, where n is the desired number of different wavelengths. Next, one of the n regions is masked and etched. The steps of masking and etching are repeated until all n regions are etched. Finally, the upper VCSEL structure is grown.
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Babic Dubravko
Lemoff Brian E.
Schneider Richard P.
Hewlett--Packard Company
Kee Pamela Lau
Mulpuri Savitri
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