Substrate processing unit and substrate processing apparatus usi

Details Substrate processing unit and substrate processing apparatus usi Substrate processing unit and substrate processing apparatus usi

1998-09-08

2000-12-05

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134147, 134186, 134902, B08B 302

Patent

active

061552755

ABSTRACT:
A substrate processing unit having a substrate processing section for processing a substrate held therein while supplying a process fluid to the substrate; an enclosure enclosing the substrate processing section and having an opening, formed in a side wall thereof, through which the substrate is carried in and out of the substrate processing section; a process fluid pipe through which the process fluid is supplied to the substrate held in the processing section; and a connector section for connecting the process fluid pipe to an external process fluid source. The connector section is provided on a side wall of the enclosure opposite across the substrate processing section from the side wall formed with the opening. A substrate processing apparatus is constituted by a plurality of such substrate processing units which are arranged with the openings thereof being oriented in substantially the same direction.

REFERENCES:
patent: 4345615 (1982-08-01), Dicicco et al.
patent: 4506687 (1985-03-01), Rosch, III
patent: 5247953 (1993-09-01), D'Amato
patent: 5313965 (1994-05-01), Palen
patent: 5485644 (1996-01-01), Shinbara et al.
patent: 5530222 (1996-06-01), Peck et al.
patent: 5868865 (1999-02-01), Akimoto
patent: 5975097 (1999-11-01), Yonemizy et al.

Affiliated with

Also associated with

Rating

Substrate processing unit and substrate processing apparatus usi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing unit and substrate processing apparatus usi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing unit and substrate processing apparatus usi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-952030