Force transducer etched from silicon

Details Force transducer etched from silicon Force transducer etched from silicon

1989-03-06

1990-08-07

Chapman, John

Measuring and testing

Dynamometers

Responsive to force

73517AV, 73DIG1, G01P 1508

Patent

active

049457730

ABSTRACT:
An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. a second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.

REFERENCES:
patent: 4286459 (1981-09-01), Trimmer et al.
patent: 4345474 (1982-08-01), Deval
patent: 4435737 (1984-03-01), Colton
patent: 4483194 (1984-11-01), Rudolf
patent: 4674319 (1987-06-01), Muller et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4736629 (1988-04-01), Cole
patent: 4805456 (1989-02-01), Howe et al.

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