Integrated heating element and method for thermal testing and co

Details Integrated heating element and method for thermal testing and co Integrated heating element and method for thermal testing and co

1980-05-27

1982-10-26

Paschall, M. H.

Electric heating

Heating devices

Combined with diverse-type art device

219121LJ, 219121LZ, 219505, 219210, 219121LM, 29574, 29585, 338225D, 29569R, 29576S, H05B 100, B01J 1700

Patent

active

043563791

ABSTRACT:
Apparatus for compensating thermal drift of temperature sensitive circuitry in an integrated circuit by heating the temperature sensitive circuitry by applying power to a heating element in the integrated circuit, testing the temperature sensitive circuitry, and trimming a thin film resistor in accordance with the testing results. The heating element is an integrated resistor adjacent to or surrounding the temperature sensitive circuitry. The integrated circuit further includes a thin film compensating resistor which affects or determines the degree of temperature sensitivity of the temperature sensitive circuitry. As the temperature of the temperature sensitive circuitry is increased, testing apparatus is utilized to measure a temperature sensitive parameter of the temperature sensitive circuitry. Control signals indicative of the amount of required trimming of the thin film compensation resistor are produced in response to the testing to adequately compensate the thermal drift of the temperature sensitive circuitry. The control signals are utilized to control the operations of a laser which precisely trims the thin film compensating resistor by the required amount.

REFERENCES:
patent: 3395265 (1968-07-01), Weir
patent: 3768157 (1973-10-01), Buie
patent: 3887785 (1975-06-01), Ahlport
patent: 3916508 (1975-11-01), Conzelmann et al.
patent: 3947801 (1976-03-01), Bube
patent: 4182024 (1980-01-01), Cometta
Graeme et al., "Operational Amplifiers Design and Applications" C 1971, pp. 59-67.

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