Capacitor construction with oxidation barrier blocks

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

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Details

257306, 501134, 501136, 501137, 361303, 3613211, 3613213, 3613215, H01G 406

Patent

active

058088547

ABSTRACT:
A capacitor apparatus includes, a) a substrate having a node; b) an inner capacitor plate in ohmic electrical connection with the substrate node; c) an outer capacitor plate; d) a capacitor dielectric layer interposed between inner and outer capacitor plates; e) an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and f) oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate. Methods of forming such a capacitor are also disclosed.

REFERENCES:
patent: 5335138 (1994-08-01), Sandhu et al.
patent: 5371700 (1994-12-01), Hamada
patent: 5381302 (1995-01-01), Sandhu et al.
patent: 5392189 (1995-02-01), Fazan et al.
patent: 5459345 (1995-10-01), Okudaira et al.
patent: 5554866 (1996-09-01), Nishioka et al.
patent: 5559666 (1996-09-01), Figura et al.
patent: 5567964 (1996-10-01), Kashihara et al.

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