Displacement converting device and method for measuring pressure

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73708, 73718, 73724, 7386147, 7386252, 3612832, G01L 912, G01L 1904

Patent

active

055983561

ABSTRACT:
A displacement converter in which a pressure difference is determined by detecting capacitances C1 and C2 between fixed electrodes 3,4 and a diaphragm 1, which receives pressure differences on both of its sides and can be displaced. The pressure difference is output as a process-unified signal via a V/I converter 209. This eliminates the need for tedious adjustments involving hardware such as a compensation capacitor in order to compensate the floating capacitance in capacitances C1, C2, which is unrelated to diaphragm displacement. Instead, calibration is simplified without decreasing measurement precision.

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patent: 4272822 (1981-06-01), Yasuhara et al.
patent: 4389646 (1983-06-01), Tago
patent: 4555952 (1985-12-01), Jenkins
patent: 4644798 (1987-02-01), Tamura et al.
patent: 5000048 (1991-03-01), Kordts
patent: 5042308 (1991-08-01), Nakamura et al.

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