Noise compensated interferometric measuring device and method us

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356357, G01B 902

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active

055982646

ABSTRACT:
A sensor and a method for using the sensor for precise measurement of displacement is disclosed. The sensor comprises a fringe tracking signal processing system which can be used with any type of interferometer to provide high resolution over a large dynamic range of motion. The signal processing is based on phase information from the interferometric signal and the sensor is not sensitive to amplitude changes.

REFERENCES:
patent: 4738527 (1988-04-01), McBrien
patent: 5208819 (1993-05-01), Huber
patent: 5412474 (1995-05-01), Reasenberg et al.
"Measurements of Ultrasmall Displacements", SPIE vol. 126, Jacobs, Aug. 1997, pp. 39-43.

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