Prefabricated modified illumination apparatus for forming fine p

Details Prefabricated modified illumination apparatus for forming fine p Prefabricated modified illumination apparatus for forming fine p

1995-03-07

1997-01-28

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 71, G03B 2754, G03B 2772

Patent

active

055982506

ABSTRACT:
A prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device having a copper plate with a transmission hole in the center; a plurality of first blades for intercepting the light which transmits the transmission hole, the blades being controlled by an external power-driven machine so that first blades vary the area of the transmission hole second blades of a cross-bar type, at least one of which intercepts the light transmitting the transmission hole and is controlled by an external power-driven machine, to vary the area of the transmission hole, and third blades of a length-bar type, at least one of which intercepts the light transmitting the transmission hole and is controlled by an external power-driven machine, vary the area of the transmission hole, wherein the second blade is superimposed on the third blade in the area of the transmission hole.

REFERENCES:
patent: 5264898 (1993-11-01), Kamon et al.

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