Method of making a thin film

Details Method of making a thin film Method of making a thin film

1980-05-28

1982-02-16

Weisstuch, Aaron

Coating processes

Coating by vapor, gas, or smoke

204192R, 204298, C23C 1300, C23C 1500

Patent

active

043159605

ABSTRACT:
A method of making a thin film by vapor depositing a source material onto a substrate, in which a mask plate is provided between the source material and the substrate at a location such that d<5l in which d denotes the distance between the mask plate and the substrate and l denotes the mean free path of the evaporated particles, or s<l in which s denotes the distance between the mask plate and the source material. The mask plate moves relative to the substrate and/or the source material during the deposition. Configuration of the mask plate is designed so as to equalize deposition rates through the above-mentioned movement.

REFERENCES:
patent: 3904503 (1975-09-01), Hanfmann

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