Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent
1998-11-20
2000-09-12
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
430 30, 430296, G03F 900
Patent
active
061175986
ABSTRACT:
With a scanning type exposure apparatus of the present invention, information of a target surface for alignment of a sensitive substrate in relation to the direction of an optical axis of a projection system is adjusted in accordance with at least one of a movement mode of a mask and a movement mode of the sensitive substrate, and based on reference information stored in a storage device, and scanning exposure is performed while aligning a surface to be exposed of the sensitive substrate and the target surface. Alternatively, an image formation surface of a pattern image of the mask is adjusted and scanning exposure is performed by aligning the image formation surface of the pattern image of the mask and a surface to be exposed of the sensitive substrate, thus enabling pattern transfer to be performed at a high exposure accuracy.
REFERENCES:
patent: 5448332 (1995-09-01), Sakakibara et al.
patent: 5737063 (1998-04-01), Miyachi
patent: 5879842 (1999-03-01), Okino
patent: 5969800 (1999-10-01), Makinouchi
Nikon Corporation
Young Christopher G.
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