Manufacturing process for high-frequency bipolar transistors

Details Manufacturing process for high-frequency bipolar transistors Manufacturing process for high-frequency bipolar transistors

1988-10-18

1991-05-07

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 73, 437 28, 148DIG103, H01L 21331

Patent

active

050136720

ABSTRACT:
The process calls for determination of the contact areas occupied by the collector, emitter and base implantations by selective removal of a layer of oxidation resistant material only from said contact areas and not from the separating zones between said areas.

REFERENCES:
patent: 3963524 (1976-06-01), Graul et al.
patent: 4082571 (1978-04-01), Graul et al.
patent: 4110779 (1978-08-01), Rathbone et al.
patent: 4143455 (1979-03-01), Schwabe et al.
patent: 4199380 (1980-04-01), Farrell et al.
patent: 4498227 (1985-02-01), Howell et al.
Ko, W. C., IEEE Trans. Elect. Devices, vol. Ed-30, No. 3, Mar. 1983, pp. 236-239.
EP 88 20 2260 The Hague.

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