Semiconductor integrated circuit device

Details Semiconductor integrated circuit device Semiconductor integrated circuit device

1989-12-14

1991-01-08

James, Andrew J.

357 71, 357 68, H01L 2348

Patent

active

049840568

ABSTRACT:
A semiconductor integrated circuit device includes a tetraethylorthosilicate film between a TiN film and a field oxide film disposed. This structure greatly reduced the possibility of separation of films in the bonding structure and contact failure as part of a wire bonding structure.

REFERENCES:
patent: 3879746 (1975-04-01), Fourier
patent: 4811076 (1989-03-01), Tigelaar et al.
patent: 4811078 (1989-03-01), Tigelaar et al.
patent: 4855801 (1989-08-01), Kuesters
patent: 4890141 (1989-12-01), Tang et al.
patent: 4903110 (1989-02-01), Aono
patent: 4914500 (1990-04-01), Liu et al.

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