Method of making a polymer-metal compound having a predetermined

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427 39, 427 44, 427109, 427124, 427125, 427252, 427253, 427255, 4272551, B05D 306

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active

050135813

ABSTRACT:
The method of making an electrically conductive polymer-metal compound having a predetermined electrical conductivity on a substrate includes the steps of preparing a reaction mixture of a gaseous metallo-organic compound, a metal-free gaseous organic compound and a carrier gas such as argon or mixtures of argon and hydrogen, producing a glow discharge zone in the reaction mixture and exposing the substrate to action of the gaseous metallo-organic compound and the metal-free gaseous organic compound in the glow discharge zone in such a way as to produce a film or layer of the polymer-metal compound with a predetermined electrical conductivity. The selection of the electrical conductivity can be made by setting at least one of a number of parameters of the process including the pressure and temperature of the glow discharge zone, the power density in the glow discharge and particularly the ratio of the amount of metal-free gaseous organic compound to carrier gas. The substrate may be a plastic such as polyimide, an aluminum or silicon oxide ceramics or glass.

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