Vacuum system

Details Vacuum system Vacuum system

1990-06-22

1991-05-07

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118 50, 414217, B65G 100, C23C 1400, C03C 1500

Patent

active

050133845

ABSTRACT:
An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A similar plate can be used for closing off a gas outlet opening of the vacuum chamber.

REFERENCES:
patent: 4622918 (1986-11-01), Bok
patent: 4687542 (1987-08-01), Davis et al.
patent: 4718957 (1988-01-01), Sensenbrenner
"Vacuum Exhausting Method", Japan (Abstract) 59-114814(A), by Nagashima-1984.
"Vacuum Exhaust Leak Device", Japan (Abstract) 61-58252(A), by Otaka-1986.

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