Fishing – trapping – and vermin destroying
Patent
1990-05-16
1991-01-08
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437939, 437946, 148DIG17, H01L 21306
Patent
active
049835483
ABSTRACT:
A method of fabricating a semiconductor device comprises steps of accommodating a substrate on which the semiconductor device is to be fabricated in a container of an electrically insulating material, forming a film of a volatile organic solvent such that the film covers substantially an entire surface of the container and the substrate accommodated therein, said step of forming the film being performed while maintaining a connection between the film of the volatile organic solvent covering the surface of the container and the ground, so that electric charges are eliminated from the substrate and the container by flowing to the ground, and removing the film of the volatile organic solvent by evaporating the solvent.
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Kobayashi Masanori
Nakashima Kazushi
Uno Masaaki
Fujitsu Limited
Fujitsu VLSI Limited
Hearn Brian E.
Quach T. N.
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