Method for micromolding ceramic structures

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

15624411, 156245, 156246, 264220, 264226, 264603, 264642, 264670, 264681, B32B 3126, C04B 35622, B29C 3340

Patent

active

057359857

ABSTRACT:
A method for micromolding ceramic articles and structures having spatial features as small as 0.1 .mu.m and having a depth ranging from 2.0 .mu.m to 100 .mu.m. A master mold of the article or structure to be molded is first fabricated using a silicon wafer and dry etching technology. A negative master mold is then produced by placing the silicon master mold device in a surrounding mold form and filling the surrounding mold form with a silicone or silicone rubber, preferably an RTV.TM. (a room temperature-vulcanizing silicone rubber compound). Such material replicates each of the micro features of the master mold in great detail to a resolution on the order of 0.1 .mu.m. The negative master mold is then used in a die to mold the desired individual elements or structures from a ceramic powder which is capable of replicating each of the micro features of the negative master mold to the desired resolution. Depending on the resolution required in a particular micromolded element, it may be necessary to use ceramic nano-particles in the micromolding process. For resolution of spatial features having dimensions as small as 0.1 .mu.m and a depth of about 2.0 .mu.m, ceramic nano-particles ranging in size from about 0.01 .mu.m to about 0.02 .mu.m can be used to micromold these features. If an integral structure is to be created from multiple micromolded ceramic elements, the elements are first assembled prior to sintering. Sintering results in an integration of the assembled elements to form a contiguous structure. A single element, or alternatively, multiple elements can be molded simultaneously from the stone mold cavity preferably using a dry pressing process or, in the alternative, a cold isostatic pressing process.

REFERENCES:
patent: 4717893 (1988-01-01), Ooi
patent: 4793697 (1988-12-01), Wu
patent: 5411690 (1995-05-01), Ghosh et al.
Griffith, M.L. et al., "Micromolding of ceramics using photolithographic polyimide patterns," Ceram. Trans., 51 (Ceramic Processing Science and Technology), 321-5, 1995.
Bride, J.A. et al., "Photolithographic micromolding of ceramics using plasma etched polyimide," Appl. Phys. Lett., 63(24), 3379-81, Dec. 1993.
Larry J. Hornbeck, Digital Light Processing and MEMS: Timely Convergence for a Bright Future, pp. 3-21, 23-24 Oct. 1996.
Kurt E. Petersen, Silicon as a Mechanical Material, pp. 39-73, May 1982.
Edward P. Furlani et al, US Patent Application entitled "Radiation Reflector", filed 21 Nov. 1996.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for micromolding ceramic structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for micromolding ceramic structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for micromolding ceramic structures will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-9327

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.