Process for manufacture of thin-film magnetic bubble domain dete

Details Process for manufacture of thin-film magnetic bubble domain dete Process for manufacture of thin-film magnetic bubble domain dete

1981-05-21

1983-06-28

Pianalto, Bernard D.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192EC, 427123, 427127, 427130, 427131, 427132, 427259, 427265, C23C 1500

Patent

active

043904041

ABSTRACT:
A process for manufacturing a thin-film magnetic bubble domain detection device in which first a spacer and then a conductor film are deposited onto a substrate, and then the conductor film is removed from a predetermined region using a mask. Thereafter a magnetic field sensing film is deposited onto the substrate, with the mask still thereon, and then the mask is removed.

REFERENCES:
patent: 3609720 (1971-09-01), Strauss
patent: 3689901 (1972-09-01), Bobeck
patent: 3691540 (1972-09-01), Almasi et al.
patent: 3701128 (1972-10-01), Copeland
patent: 3702995 (1972-11-01), Bobeck et al.
patent: 3996575 (1976-12-01), Battarel
patent: 4031526 (1977-06-01), Archer et al.
patent: 4079359 (1978-03-01), Gergis
Reekstin, J. P. et al., Fabrication of 10.sup.4 Bit Permalloy-First Magnetic Bubble Circuits on Epitaxial Garnet Chips, J. Vac. Sci. Technol., v-10, N-5, Sep./Oct., 1973, pp. 847-851.
Somekh, S., Introduction to Ion and Plasma Etching, J. Vac. Sci. Technol., v-13 N-5, Sep./Oct. 1976, pp. 1003-1007.
Sadagopan, V. et al., High Density Bubble Domain Shift Register AIP Conference Proceedings, No. 5, 1971, pp. 215-219.
Melliar-smith, C. M., Ion Etching for Pattern Delineation, J. Vac. Sci. Technol., v-13, No. 5 Sep./Oct. 1976, pp. 1008-1022.
Smith, Bubble-Domain Memory Device (incld. reprinted articles) Artech House Inc., 1974, pp. 12 and 205-224.

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