Photosensitive solubilization inhibition agents, and deep ultra-

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430170, 430192, 430193, 430326, 430330, 534556, G03C 154, G03C 160, C07C11300

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active

047525517

ABSTRACT:
Photosensitive solubilization inhibitor compounds of the formula ##STR1## wherein: x is an integer equal to the valence or functionality of the radical R, and

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Schwall, H., et al, "Thermolysis of 6-Membered 2-Diazo-1,3 Diketones in Pyridine and in Aniline", Index Chemicals, 34, 115474, (1969).
Best, W. M., et al., "Intramolecular Diels-Alder Additions of Benzynes to Furans", Current Abstracts of Chemistry, vol. 103, Issue 1189, 1986.
Korobitsyna, I. K., et al., Zhurnal Organicheskoi Khimii, Jun. 1976, vol. 12, No. 6, pp. 1245-1260.
Deep UV Photoresists I. Meldrum's Diazo Sensitizer, Barbara D. Grant et al.
IEEE Transactions on Electron Devices, vol. ED-28, No. 11, Nov. 1981.

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